TECHNOLOGY

Know-how The know-how for high power laser diode (LD) and laser array (LA) manufacturing has been developed basing on 15-years of experience of ATC-SD specialists in research, development and manufacturing of LD. The know-how comprises a complete technological cycle for post-growth processing of laser heterostructures, and production of LD's and LA's with the generation wavelength 0,79 - 0,98 micron. The proposed technology provides the manufacturing of high efficient, high power LD with output optical power up to 4 W (CW) and LA with output optical power up to 100 W (QCW) for the following applications: solid state laser pumping medicine: therapy, ophthalmology, oncology, surgery free space communication beacon and illumination alarm systems automatics and robotics spectroscopy and other scientific applications Features excellent, world-level laser parameters a complete set of technological operations reliability high reproducibility low cost ATC-SD technological equipment flexibility Technology description An original technological cycle includes the following basic technological operations: ohmic contact deposition and annealing mask fabrication for dry etching dry etching by collimated ion beam additional insulation technique of etched regions evaporation of adhesive and enhancing metal layers sputtering of laser multilayer dielectric mirrors and antireflection protective coatings laser diode packaging testing The proposed technology supplies monitoring of optical electric parameters of structures and chips at separate stages. It provides fabrication of laser diodes with low series ohmic resistance, heat resistance of 5-10 degree/W and internal quantum efficiency of active layers about 100%. Flexibility All operations constitute a single technological cycle. So, when operations on grid fabrication and re-growth added, the proposed technological array for high power laser fabrication may be used for production of DFB or single-mode lasers. A postgrowth technological complex has been developed for Al-Ga-As, but may be also used for fabrication of lasers on the base of other III-V compounds. All technological operations are developed at the basic level and can be reproduced on any similar foreign technological equipment. ATC-SD offers a complete set of technical documentation, provides training and know-how transfer to Customer's staff both in the laboratories of the ATC-SD and of the Customer ones. ATC-SD also offers technological equipment providing implementation of the developed technological processes with highest efficiency.

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